The new FML frame mounted wafer loader is a tool intended to allow a easy and safe microscope inspection for wafers already mounted on dicing frames.

This equipment have been designed to fulfill the needs of microscope inspection and defect review.
Such needs required a careful design, based on the state of the art technological solutions for both mechanics and control system.

Specifications

• Frame size 150 or 200 mm – single size
• Frame design According to SEMI standards (special design on request)
• Class 100 clean room compatible
• Computer control with touch screen graphical interface
• Micro inspection
• Sequential inspection mode with possibility of direct selection
• Laser cassette mapping
• Compatible with Leica DM8000 microscope and many other brands
• Footprint: W 800 x D 700 x H 650