This equipment have been designed to fulfill the needs of microscope inspection and defect review.
Such needs required a careful design, based on the state of the art technological solutions for both mechanics and control system.
- Frame size 150 or 200 mm – single size
- Frame design According to SEMI standards (special design on request)
- Class 100 clean room compatible
- Computer control with touch screen graphical interface
- Micro inspection
- Sequential inspection mode with possibility of direct selection
- Laser cassette mapping
- Compatible with Leica DM8000 microscope and many other brands
- Footprint: W 800 x D 700 x H 650